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A cantilever resonator with integrated actuation and sensing fabricated using a single step lithography

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TitleA cantilever resonator with integrated actuation and sensing fabricated using a single step lithography
Publication TypeJournal Article
Year of Publication2013
AuthorsMohanasundaram, SM, Pratap, R, Ghosh, A
JournalIEEE Sensors Journal
Volume13
Research Area: 
MEMS/NEMS