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Coupled Nonlinear Effects of Surface Roughness and Rarefaction on Squeeze Film Damping in MEMS Structures

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TitleCoupled Nonlinear Effects of Surface Roughness and Rarefaction on Squeeze Film Damping in MEMS Structures
Publication TypeJournal Article
Year of Publication2004
AuthorsPandey, AK, Pratap, R
JournalJournal of Micromech. Microeng
Volume14
Research Area: 
MEMS/NEMS