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Influence of Boundary Conditions on the Dynamic Characteristics of Squeeze Films in MEMS Devices

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TitleInfluence of Boundary Conditions on the Dynamic Characteristics of Squeeze Films in MEMS Devices
Publication TypeJournal Article
Year of Publication2007
AuthorsPandey, AKumar, Pratap, R, Chau, FSiong
JournalIEEE/ASME Journal of MEMS
Volume16
Pagination893–903
Research Area: 
MEMS/NEMS