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Intrinsic Stresses in AlN layers grown by MOCVD on (0001) sapphire and (111) Si substrates

TitleIntrinsic Stresses in AlN layers grown by MOCVD on (0001) sapphire and (111) Si substrates
Publication TypeJournal Article
Year of Publication2004
AuthorsRaghavan, S, Redwing, JM
JournalJournal of Applied Physics
Volume96
Pagination2995–3003