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Partitioning Design Space for Linear Tuning of Natural Frequencies in Planar Dynamic MEMS Structures

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TitlePartitioning Design Space for Linear Tuning of Natural Frequencies in Planar Dynamic MEMS Structures
Publication TypeJournal Article
Year of Publication2006
AuthorsKumar, S, Pratap, R
JournalSensors and Actuators A: Physical
Volume125
Research Area: 
MEMS/NEMS