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A Photoacoustic Imaging Device using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)

TitleA Photoacoustic Imaging Device using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)
Publication TypeJournal Article
Year of Publication2019
AuthorsDangi, A, Cheng, C, Agrawal, S, Tiwari, S, Datta, GRamesh, Benoit, R, Pratap, R, Trolier-McKinstry, S, Kothapalli, S-R
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
KeywordsElectrodes, Optical arrays, Optical fibers, Photoacoustic imaging, Transducers, Ultrasonic imaging

A linear piezoelectric micromachined ultrasound transducer (PMUT) array was fabricated and integrated into a device for photoacoustic imaging of tissue phantoms. The PMUT contained 65 array elements; each element having 60 diaphragms of 60 µm diameter and 75 µm pitch. A lead zirconate titanate (PZT) thin film was used as the piezoelectric layer. The in-air vibration response of the PMUT array elements showed a first mode resonance between 6 MHz and 8 MHz. Hydrophone measurements showed 16.2 kPa average peak ultrasound pressure output at 7.5 mm from one element excited with 5 Vpp input. A receive sensitivity of ∼0.48 mV/kPa was observed for a PMUT array element with 0 dB gain. The PMUT array was bonded to a custom printed circuit board to enable compact integration with an optical fiber bundle for photoacoustic imaging. A broad photoacoustic bandwidth of ∼89% was observed for the photoacoustic response captured from absorbing pencil lead targets. Linear scanning of a single element of a PMUT array was performed on different tissue phantoms embedded with light absorbing targets to successfully demonstrate B-mode photoacoustic imaging using PMUTs.