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In-situ stress measurements during the MOCVD growth of AlN buffer layers on (111) Si substrates

TitleIn-situ stress measurements during the MOCVD growth of AlN buffer layers on (111) Si substrates
Publication TypeJournal Article
Year of Publication2004
AuthorsRaghavan, S, Redwing, JM
JournalJournal of Crystal Growth
Volume261
Pagination294-300