| Title | Thick PECVD Germanium Films for MEMS Application. In Physics of Semiconductor Devices |
| Publication Type | Book |
| Year of Publication | 2014 |
| Authors | B. Rao, R, Bhat, N, Sikdar, SK |
| Series Editor | Jain, AVerma VK |
| Number of Pages | 469–471 |
| Publisher | Springer Verlag |
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