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Tuning the sensitivity of a metal-based piezoresistive sensor using electromigration

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TitleTuning the sensitivity of a metal-based piezoresistive sensor using electromigration
Publication TypeJournal Article
Year of Publication2012
AuthorsMohanasundaram, SM, Pratap, R, Ghosh, A
JournalJournal of Microelectromechanical Systems
Volume21
Pagination1276-1278
Research Area: 
MEMS/NEMS