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An ultralow power nanosensor array for selective detection of air pollutants

TitleAn ultralow power nanosensor array for selective detection of air pollutants
Publication TypeJournal Article
Year of Publication2019
AuthorsPrajapati, CShekhar, Benedict, S, Bhat, N

Semiconducting metal oxide gas sensors typically operate at a high temperature and consume hundreds of milliwatts of power. Therefore there is great demand for the development of a low-power gas-sensing technology that can sensitively and selectively detect the gas analytes present in the atmosphere. We report an ultralow-power nanosensor array platform, integrated with an independently controlled nanoheater of size 4 μ× 100 nm, which consumes ~1.8 mW power when operated continuously at 300 °C. The heaters exhibit a fast thermal response time of less than 1 μs, and can be utilized to operate in duty cycle mode, leading to power saving. The active area of the nanosensor is 1 μ× 200 nm, defined by sensing electrodes with a nanogap of ~200nm, leading to small form factor. As a proof of concept, each of the sensing elements in the array is functionalized with different sensing materials to demonstrate a low-power, sensitive and selective multiplexed gas-sensing technology for the simultaneous detection of CO (~93.2% for 3 ppm at 300 °C), CO2 (~76.3% for 1000 ppm at 265 °C), NO2 (~2301% for 3 ppm at 150 °C) and SO2 (~94% for 3 ppm at 265 °C). The technology described here uses scalable crossbar architecture for sensor elements, thus enabling the integration of additional sensing materials and making it customizable for specific applications.