| Title | Waveguide integration silicon MSM photodetector in silicon nitride-on-SOI platform for visible and NIR wavelength band |
| Publication Type | Conference Paper |
| Year of Publication | 2018 |
| Authors | Chatterjee, A, Selvaraja, SKumar |
| Conference Name | Optical Components and Materials XV |
| Publisher | International Society for Optics and Photonics |
| Keywords | Electrodes, Near infrared, Optical fibers, Oxides, photodetectors, silicon, Waveguides |
| Abstract | We propose and demonstrate a Silicon MSM photodetector integrated on Silicon Nitride-on-SOI platform. The demonstration shows the feasibility of an integrated photonic circuit platform in the visible to NIR wavelength with an integrated Silicon photodetector. We present a planarization free oxidation based Silicon Nitride waveguide fabrication on SOI. DC measurements on photo-detectors with the top illumination of 850 nm light observe the best responsivity of 0.1 A/W at 20 V with a dark current of 570 nA. |
| DOI | 10.1117/12.2290306 |
