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Publications

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Filters: Keyword is sputtered thin film  [Clear All Filters]
2008
N. Gokhale, Parmar, M. , Rajanna, K. , and Nayak, M. M. , Piezoelectric zinc oxide thin film for MEMS application: A comparative study, in 2008 3rd International Conference on Sensing Technology, 2008, pp. 543-546.