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Publications

Found 1 results
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Filters: Keyword is post deposition annealing  [Clear All Filters]
2012
K. L. Ganapathi, Bhat, N. , and Mohan, S. , Optimization of oxygen flow rate for e-beam evaporated HfO2 thin films, in Emerging Electronics (ICEE), 2012 International Conference on, 2012, pp. 1-4.