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Publications

Found 4 results
Author [ Title(Desc)] Type Year
Filters: Keyword is micromachining  [Clear All Filters]
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D
S. Shekhar, Vinoy, K. J. , and Ananthasuresh, G. K. , Design, fabrication and characterization of capacitive RF MEMS switches with low pull-in voltage, in 2014 IEEE International Microwave and RF Conference (IMaRC), 2014, pp. 182-185.
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S. Khan and Ananthasuresh, G. K. , Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical Amplifiers, Journal of Microelectromechanical Systems, vol. 23, pp. 871-887, 2014.
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K. Murphy, Mackenzie, M. D. , Chi, H. , Varma, M. , Pal, P. , Paterson, L. , and Kar, A. K. , Laser micromachined SERS substrates in etched fused silica (Conference Presentation), in Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVIII, 2018.
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K. Roy, Mandal, A. , Ashok, A. , Gupta, H. , Shastri, V. , and Pratap, R. , A Single Cell PMUT as a Bio-Fluid Density Sensor, in 2020 IEEE International Ultrasonics Symposium (IUS), 2020.