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Publications

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W. Xie, Fiers, M. , Selvaraja, S. K. , Van Campenhout, J. , Absil, P. , and Van Thourhout, D. , High-Performance Photonic Crystal Nanocavities on 300 mm SOI Substrate Fabricated With 193nm Immersion Lithography, Journal of Lightwave technology, vol. 32, 2014.