Micro-Electro-Mechanical Systems (MEMS) and its nano-scale counterpart, Nano-Electro-Mechanical Systems (NEMS), refer to the entire technology of design, fabrication, and deployment of micro and nano-scale mechanical structures tightly coupled with, and many a times co-fabricated with, the required electronics for sensing and actuation applications. These devices are not only important for practical applications but are also of immense importance in fundamental research. MEMS business worldwide is currently estimated to be close to Rs.5 Lakh Crores. These include sensors, accelerometers, actuators which form critical components in a range of products including cars, cell phones and inkjet printers. Current research efforts at CeNSE in the area of NEMS/MEMS include:
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