Research Highlights

Our Research Focus Areas

  • Physics through MEMS/NEMS
    • Energy loss mechanisms in MEMS/NEMS resonators
    • Nonlinearities and phase noise vis-a-vis different material systems (such as piezoelectrics, superconductors etc) and applied external fields such as fluid flow fields, temperature gradients, magnetic field etc.
    • Parametric excitation
    • Phononic Crystals
    • Phase Transition Oscillators for Neuromorphic applications
    • Oscillator circuit topologies
    • Quantum phenomena
  • MEMS/NEMS wafer-scale packaging
  • Sensor systems
    • Arrays of Resonant Accelerometers
    • Arrays of Capacitive Micromachined Ultrasonic Transducer (CMUTs)

    • Technologies Developed

      Deposition of high quality thick piezoelectric AlN films
      Fabrication of AlN transduction based accelerometers
      Fabrication of Large channel electrically actuated Suspended Microchannel Resonators (SMR)
      Fabrication of Large arrays of Capacitive Micromachined Ultrasonic Transducer (CMUTs)
      Fabrication of Suspended VO2 microwire resonators
      Open SOI based devices
      Epi-seal process for wafer scale MEMS packaging
      Measurement technology for spontaneous polarization of piezoelectric fields