Amorphous silicon photonic crystals made with 193nm lithography

S. Selvarajaa, Bogaerts, W., Dumon, P., Van Thourhout, D., and Baets, R., “Amorphous silicon photonic crystals made with 193nm lithography”, in The 8th International Photonic $&$ Electromagnetic Crystal Structures Meeting (PECS), Australia, 2009.