Publications

Found 6 results
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2012
W. Xie, Fiers, M., Selvarajaa, S., Van Campenhout, J., Absil, P., and Van Thourhout, D., High-Q photonic crystal nanocavities on 300 mm SOI substrate fabricated by 193 nm immersion lithography, in Proceedings of the 2012 Annual Symposium of the IEEE Photonics Society Benelux Chapter, Belgium, 2012, pp. 183-186.
S. Selvarajaa et al., Si photonic device uniformity improvement using wafer-scale location specific processing, IEEE Photonics Conference, pp. 725-726, 2012.
2007
W. Bogaerts et al., A Platform for Silicon-on-Insulator Nanophotonics on Industrial CMOS Tools, in Photonic and Electromagnetic Crystal Structures (PCS-VII), United States, 2007.