Advanced Micro and Nano Fabrication Technology and Process

Course Code: 
NE 203
Course Credit: 
Course Term: 
Sushoban Avasthi / Shankar Kumar Selvaraja

This is a graduate-level course for students who are interested in micro and nano fabrication technology and process. The main object of the course is to introduce technology and processes that are used in fabricating advanced microelectronic devices and circuits. The primary focus is on the unit process technology.