On-chip Silicon-photonics based integrated vibrometer

V. Mere, Dash, A., Kallega, R., Pratap, R., Naik, A., and Selvaraja, S. K., On-chip Silicon-photonics based integrated vibrometer, SPIE Photonics West, MOEMS and Miniaturized Systems XVIII , vol. 10931. SPIE, San Francisco, p. 109310T , 2019.
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