Publications
“SOI Thickness Uniformity Improvement using Corrective Etching for Silicon Nano-Photonic Device”, in 8th International Conference on Group IV Photonics, United Kingdom, 2011, pp. 71-73.
, “SOI thickness uniformity improvement using wafer-scale corrective etching for silicon nano-photonic device”, in 16th Annual Symposium of the IEEE Photonics Benelux Chapter, Belgium, 2011, pp. 289-292.
,