Prof. Rudra Pratap's Research Group
Structure fabricated by SOI on glass method
tructure fabricated by SOI on glass method
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MEMS Gyroscope
One of the many areas in which we are conducting research is the design and development of MEMS gyroscopes. Through this research, we have developed a modified SOI-on-Glass process for stress-free MEMS structures which involves a novel wafer bonding technique as show in Figure 2. From the microfabricated structures, we have published a study of pressure-dependent squeeze film stiffness as a resonance modulator using static and dynamic measurements. Gyroscope structures have been characterized for mechanical and electrical responses.
figure 3: Micro fabricated accelerometer structure and Dynamic response of accelerometer.
figure 1: Modified SOI-on-Glass process accelerometer structure.
Figure 2: Hybrid Si to glass bond
figure 4: Accelerometer structure dynamic response at different pressures.
MEMS Lab, Centre for Nano Science and Engineering, Indian Institute of Science. Bangalore-560012
Phone: +91 (80) 2293 3250, +91 (80) 2360 8659 Fax: +91 (80) 2360 1648 Email: pratap@iisc.ac.in, memslab@iisc.ac.in