CENTRE FOR NANO SCIENCE AND ENGINEERING

CORE FACULTY

SAURABH CHANDORKAR

SAURABH CHANDORKAR

Assistant Professor

Room No: FF 08
Email: saurabhc@iisc.ac.in
Phone: +91 80 2293 3638
Group webpage: Microsystems Lab

Education

  • PhD Mechanical Engineering with minor in Electrical Engineering, 2009, Stanford University, USA
  • MS Mechanical Engineering, 2005, Stanford University, USA
  • B.Tech. Mechanical Engineering, 2003, IIT Bombay

Experience

  • Assistant Professor, IISC Bangalore, December 2017 – Present
  • Lecturer, Mechanical Engineering Department at Stanford University, March 2017-December 2017
  • Research Consultant, IIT Bombay, July 2016 – March 2017
  • Advanced Equipment Engineer, Intel October 2010- July 2016
  • Postdoctoral Fellow, Stanford University, April 2009- September 2010

Research Interests

  • Physics through MEMS/NEMS
    • Energy loss mechanisms in MEMS/NEMS resonators
    • Nonlinearities and phase noise vis-a-vis different material systems (such as piezoelectrics, superconductors etc) and applied external fields such as fluid flow fields, temperature gradients, magnetic field etc.
    • Parametric excitation
    • Phononic Crystals
    • Phase Transition Oscillators for Neuromorphic applications
    • Oscillator circuit topologies
    • Quantum phenomena modulated by MEMS
  • MEMS/NEMS wafer-scale packaging
  • Sensor systems
    • Arrays of Resonant Accelerometers
    • Arrays of Capacitive Micromachined Ultrasonic Transducer (CMUTs)

Recent Publications

  • D. Chugh, H. -K. Kwon, G. D. Haddon-Vukasin, T. W. Kenny and S. A. Chandorkar, “Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators,” in Journal of Microelectromechanical Systems, vol. 34, no. 2, pp. 116-133, April 2025.
  • S. Sharma and S. A. Chandorkar, “Flow-induced frequency shifts in suspended microchannel resonators with ultra-thin walls and large hydraulic diameter,” Journal of Applied Physics, vol. 136, no. 22, Dec. 2024.
  • V. Kumar, S. Tiwari, G. Pillai, R. Pratap and S. A. Chandorkar, “Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices,” in Journal of Microelectromechanical Systems, vol. 33, no. 6, pp. 793-805, Dec. 2024
  • Khandelwal, U., Sandilya, R.S., Rai, R.K., Sharma, D., Mahapatra, S.R., Mondal, D., Bhat, N., Aetkuri, N.P., Avasthi, S., Chandorkar, S. and Nukala, P. Large electro-opto-mechanical coupling in VO2 neuristors. Applied Physics Reviews, 11(2), 2024.
  • Khandelwal, U., Guo, Q., Noheda, B., Nukala, P. and Chandorkar, S., Dynamics of voltage-driven self-sustained oscillations in NdNiO3 neuristors. ACS Applied Electronic Materials, 5(7), pp.3859-3864, 2023.
  • Parate, S.K., Vura, S., Pal, S., Khandelwal, U., Sandilya Ventrapragada, R.S., Rai, R.K., Molleti, S.H., Kumar, V., Patil, G., Jain, M. and Mallya, A., Chandorkar, SA and Nukala, Pavan, Giant electrostriction-like response from defective non-ferroelectric epitaxial BaTiO3 integrated on Si (100). Nature Communications, 15(1), p.1428., 2024.
  • Palaparthy, V.S., Surya, S.G., Gajarushi, A.S., Chandorkar, S.A., Kundu, T., Baghini, M.S. and Rao, V.R., Nanophotonic crystal waveguide with embedded piezoresistor on MEMS cantilever for sensing application. IEEE Sensors Journal, 21(12), pp.13735-13743, 2021.
  • Palaparthy, V.S., Doddapujar, S.N., Surya, S.G., Chandorkar, S.A., Mukherji, S., Baghini, M.S. and Rao, V.R., Hybrid pattern recognition for rapid explosive sensing with comprehensive analysis. IEEE Sensors Journal, 21(6), pp.8011-8019, 2020.
  • S. Tiwari, R. Kumar, S. A. Chandorkar and R. Pratap, “Fully Differential Actuation and Sensing in Piezoelectric Diaphragm Resonators for High Signal to Background Resonant Sensing,” in Journal of Microelectromechanical Systems, vol. 29, no. 5, pp. 888-893, Oct. 2020
  • Rodriguez, J., Chandorkar, S. A.,Watson, C.A. et al. Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator. Sci Rep 9, 2244 (2019).
  • Palaparthy, V.S., Doddapujar, S.N., Gupta, G., Das, P., Chandorkar, S.A., Mukherji, S., Baghini, M.S. and Rao, V.R., E-Nose: Multichannel Analog Signal Conditioning Circuit With Pattern Recognition for Explosive Sensing. IEEE Sensors Journal, 20(3), pp.1373–1382, 2020.
  • Rodriguez, J., Chandorkar, S.A., Glaze, G.M., Gerrard, D.D., Chen, Y., Heinz, D.B., Flader, I.B. and Kenny, T.W., Direct detection of anchor damping in MEMS tuning fork resonators. Journal of Microelectromechanical Systems, 27(5), pp.800-809, 2018.

Recent Refereed International Conference publications:

  • Vishnu Kumar, Shreeraj Joshi, Sudhanshu Tiwari, Upanaya Khandelwal, Rudra Pratap, Pavan Nukala, and Saurabh Arun Chandorkar, “A superharmonic resonance response measurement (srrm): A new method for measuring spontaneous polarization”, in Hilton Head Workshop 2024: A Solid-State Sensors, Actuators and Microsystems Workshop, 2024.
  • Disha Chugh, Hyun-Keun Kwon, Gabrielle D. Vukasin, and Saurabh A. Chandorkar, “Methodology to quantify contribution of various feedthrough sources in epi-sealed devices”, in Hilton Head Conference, 2024.
  • Pavitra Jain, Garvit Gupta, Hyun-Keun Kwon, Gabrielle D. Vukasin, and Saurabh A. Chandorkar, “Machine learning based nonlinear resonator system identification”, in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), 2024, pp. 541-544,
  • Vishnu Kumar, Sudhanshu Tiwari, Shreeraj Joshi, and Saurabh Arun Chandorkar, “Novel estimation method for dielectric loss quality factor in composite soi/pzt devices”, in 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Con- ference (MEMS), 2022, pp. 754-757.
  • Vishnu Kumar, Bhargavi BA, and Saurabh Arun Chandorkar, “Electrostatically trans- duced 1d silicon phononic crystals and cavity interactions”, in School and Workshop on Frontiers of Nanomechanics, 2024.
  • Upanya Khandelwal, Rama Satya Sandilya, Qikai Guo, Beatriz Noheda, Sushobhan Avasthi, Saurabh Chandorkar, and Pavan Nukala, “Neuron-like electro-mechano-optical oscilla- tions from mott insulators”, in ICMAT, Singapore, 2023.
  • Vishnu Kumar, Nishta Arora, Bhargavi BA, Akshay Naik, and Saurabh Arun Chandorkar, “Anomalous parametric amplification of degenerate first mode in micromechanical coupled beam system”, in Frontiers of Nanomechanical Systems (FNS), 2023.
  • Anju Sebastian, Anirudh Venugopalarao, Saurabh Chandorkar, and Srinivasan Ragha- van, “A two-step aln thin film for energy harvesting & acoustic mems resonator”, in IUMRS-International Conference on Advanced Materials & International Conference on Materials for Advanced Technologies, Singapore, June 2023.
  • Anju Sebastian, Anirudh Venugopalarao, Saurabh Chandorkar, and Srinivasan Ragha- van, “A two-step aln thin film for energy harvesting & acoustic mems resonator”, in IEEE International Frequency Control Symposium & European Frequency and Time Fo- rum (IFCS-EFTF), Toyama, Japan, May 2023.
  • Samridh Sharma and Saurabh Arun Chandorkar, “Internal resonance phenomenon in suspended microchannel resonator fabricated using thermo-compression wafer bonding”, in International Workshop on Nanomechanical Sensing, 2021, vol. 21, pp. 13735-13743.
  • Upanya Khandelwal, Qikai Guo, Beatriz Noheza, Saurabh A. Chandorkar, and Pavan Nukala, “Electrical and mechanical tonic bursting in defective vanadium dioxide”, in MRS, 2022.
  • Upanya Khandelwal, Sushobhan Awasthi, Saurabh A. Chandorkar, and Pavan Nukala, “Dynamics of voltage-driven self sustained current oscillations in NdNiO3”, in Quorom7, 2022.
  • Jagriti Singh, Vaibhav Sharma, Saurabh Chandorkar, and Prosenjit Sen, “Bacterial force on nanopillars: Interaction at single cell”, in 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, pp. 1040-1043.
  • Lizmarie Comenencia Ortiz, Ian B Flader, Gabrielle D Vukasin, Dustin D Gerrard, Saurabh A. Chandorkar, Janna Rodriguez, Dongsuk D Shin, Ryan Kwon, David B Heinz, Yun- han Chen, W Park, Kenneth E. Goodson, and Thomas W. Kenny, “Thermal effects of ovenized clocks on episeal encapsulated inertial measurement units”, in 2018 IEEE Micro Electro Mechanical Systems (MEMS). IEEE, 2018, pp. 980-983.
  • Janna Rodriguez, Dustin D Gerrard, Grant M Glaze, Saurabh A. Chandorkar, Yunhan Chen, Ian B Flader, Dongsuk D Shin, and Thomas W Kenny, “Unanticipated results in the first direct measurements of anchor damping in mems resonators”, in Micro Electro Me- chanical Systems (MEMS), 2018 IEEE. IEEE, 2018, pp. 543-546.

Recent Refereed National Conference publications:

  • Vishnu Kumar and Saurabh Arun Chandorkar, “A hybrid approach to estimate en- ergy loss parameters in piezomems”, in Functional Oxides: Materials and Devices, 2023.
  • Samridh Sharma and Saurabh Arun Chandorkar, “Fabrication and characterization of suspended microchannel resonators”, in ICEE, 2021.
  • Shreeraj Joshi and Saurabh Arun Chandorkar, “Thermoelastic dissipation in square plates with etch holes:thermal mode approach”, in ICEE, 2021.
  • Saurabh A. Chandorkar, “Energy loss mechanisms in micromechanical resonators”, in International Conference on Smart Materials (ISSS), 2019. Invited Talk.
  • Shubham Jadhav, Babusha Singh, Saurabh Chandorkar, and Rudra Pratap, “Optimiza- tion of platinum thin film as a bottom electrode for aluminum nitride thin films using plackett-burman statistical approach”, in 2018 4th IEEE International Conference on Emerging Electronics (ICEE). IEEE, 2018, pp. 14.

 

  • Vishnu Kumar, Shreeraj Joshi, Sudhanshu Tiwari, Upanaya Khandelwal, Rudra Pratap, Pavan Nukala, and Saurabh Arun Chandorkar, “A superharmonic resonance response measurement (srrm): A new method for measuring spontaneous polarization”, in Hilton Head Workshop 2024: A Solid-State Sensors, Actuators and Microsystems Workshop, 2024. Refereed International Conference.
  • Disha Chugh, Hyun-Keun Kwon, Gabrielle D. Vukasin, and Saurabh A. Chandorkar, “Methodology to quantify contribution of various feedthrough sources in epi-sealed devices”, in Hilton Head Conference, 2024.Refereed International Conference.
  • Pavitra Jain, Garvit Gupta, Hyun-Keun Kwon, Gabrielle D. Vukasin, and Saurabh A. Chandorkar, “Machine learning based nonlinear resonator system identification”, in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), 2024, pp. 541-544, Refereed International Conference.
  • Vishnu Kumar, Sudhanshu Tiwari, Shreeraj Joshi, and Saurabh Arun Chandorkar, “Novel estimation method for dielectric loss quality factor in composite soi/pzt devices”, in 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Con- ference (MEMS), 2022, pp. 754-757. Refereed International Conference.
  • Vishnu Kumar, Bhargavi BA, and Saurabh Arun Chandorkar, “Electrostatically trans- duced 1d silicon phononic crystals and cavity interactions”, in School and Workshop on Frontiers of Nanomechanics, 2024. Refereed International Conference.
  • Vishnu Kumar and Saurabh Arun Chandorkar, “A hybrid approach to estimate en- ergy loss parameters in piezomems”, in Functional Oxides: Materials and Devices, 2023. National Conference.
  • Upanya Khandelwal, Rama Satya Sandilya, Qikai Guo, Beatriz Noheda, Sushobhan Avasthi, Saurabh Chandorkar, and Pavan Nukala, “Neuron-like electro-mechano-optical oscilla- tions from mott insulators”, in ICMAT, Singapore, 2023. Refereed International Confer- ence.
  • Vishnu Kumar, Nishta Arora, Bhargavi BA, Akshay Naik, and Saurabh Arun Chandorkar, “Anomalous parametric amplification of degenerate first mode in micromechanical coupled beam system”, in Frontiers of Nanomechanical Systems (FNS), 2023. Refereed International Conference
  • Anju Sebastian, Anirudh Venugopalarao, Saurabh Chandorkar, and Srinivasan Ragha- van, “A two-step aln thin film for energy harvesting & acoustic mems resonator”, in IUMRS-International Conference on Advanced Materials & International Conference on Materials for Advanced Technologies, Singapore, June 2023. Refereed International Conference.
  • Anju Sebastian, Anirudh Venugopalarao, Saurabh Chandorkar, and Srinivasan Ragha- van, “A two-step aln thin film for energy harvesting & acoustic mems resonator”, in IEEE International Frequency Control Symposium & European Frequency and Time Fo- rum (IFCS-EFTF), Toyama, Japan, May 2023. Refereed International Conference.
  • Samridh Sharma and Saurabh Arun Chandorkar, “Internal resonance phenomenon in suspended microchannel resonator fabricated using thermo-compression wafer bonding”, in International Workshop on Nanomechanical Sensing, 2021, vol. 21, pp. 13735-13743. Refereed International Conference.
  • Upanya Khandelwal, Qikai Guo, Beatriz Noheza, Saurabh A. Chandorkar, and Pavan Nukala, “Electrical and mechanical tonic bursting in defective vanadium dioxide”, in MRS, 2022. Refereed International Conference.
  • Upanya Khandelwal, Sushobhan Awasthi, Saurabh A. Chandorkar, and Pavan Nukala, “Dynamics of voltage-driven self sustained current oscillations in NdNiO3”, in Quorom7, 2022. Refereed International Conference.
  • Samridh Sharma and Saurabh Arun Chandorkar, “Fabrication and characterization of suspended microchannel resonators”, in ICEE, 2021. Refereed National Conference.
  • Shreeraj Joshi and Saurabh Arun Chandorkar, “Thermoelastic dissipation in square plates with etch holes:thermal mode approach”, in ICEE, 2021. Refereed National Conference.
  • Jagriti Singh, Vaibhav Sharma, Saurabh Chandorkar, and Prosenjit Sen, “Bacterial force on nanopillars: Interaction at single cell”, in 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, pp. 1040-1043. Refereed International Conference.
  • Saurabh A. Chandorkar, “Energy loss mechanisms in micromechanical resonators”, in International Conference on Smart Materials (ISSS), 2019. Refereed National Conference, Invited Talk.
  • Shubham Jadhav, Babusha Singh, Saurabh Chandorkar, and Rudra Pratap, “Optimiza- tion of platinum thin film as a bottom electrode for aluminum nitride thin films using plackett-burman statistical approach”, in 2018 4th IEEE International Conference on Emerging Electronics (ICEE). IEEE, 2018, pp. 14. Refereed National Conference.
  • Saurabh A. Chandorkar, “Anchor loss in micromechanical resonators: We understand it, or do we?”, in IEEE International Conference on Emerging Electronics (ICEE), 2018. Refereed National Conference, Invited Talk.
  • Lizmarie Comenencia Ortiz, Ian B Flader, Gabrielle D Vukasin, Dustin D Gerrard, Saurabh A. Chandorkar, Janna Rodriguez, Dongsuk D Shin, Ryan Kwon, David B Heinz, Yun- han Chen, W Park, Kenneth E. Goodson, and Thomas W. Kenny, “Thermal effects of ovenized clocks on episeal encapsulated inertial measurement units”, in 2018 IEEE Micro Electro Mechanical Systems (MEMS). IEEE, 2018, pp. 980-983. Refereed International Conference.
  • Janna Rodriguez, Dustin D Gerrard, Grant M Glaze, Saurabh A. Chandorkar, Yunhan Chen, Ian B Flader, Dongsuk D Shin, and Thomas W Kenny, “Unanticipated results in the first direct measurements of anchor damping in mems resonators”, in Micro Electro Me- chanical Systems (MEMS), 2018 IEEE. IEEE, 2018, pp. 543-546. Refereed International Conference.

Patents

  • R. Melamud, B. Kim, M. Hopcroft, S. A. Chandorkar, M. Agarwal and T. W. Kenny, “Composite mechanical transducers and approaches therefor”, US 2007/0277620 A1, Dec 6, 2007
  • R. Melamud, B. Kim, M. Hopcroft, S. A. Chandorkar, M. Agarwal and T. W. Kenny, “Composite mechanical transducers and approaches therefor”, US 2010/7806586 A1, Oct 5, 2010
  • S. A. Chandorkar, Y. K. Liu, P. Warner, M. Penchev, T. Malahat and K. Chakravorty, “Charge accumulation mitigation by surface energy modification”, Intel Trade Secret, Dec 2014