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Saurabh Chandorkar

Publications

  • S. Ghaffari, S. A. Chandorkar, S. Wang, E. J. Ng, C. H. Ahn, V. Hong, Y. Yang, and T. W. Kenny, “Quantum limit of quality factor in silicon micro and nano mechanical resonators,” Scientific reports, vol. 3, 2013.
  • H. K. Lee, R. Melamud, B. Kim, S. Chandorkar, J. C. Salvia, and T. W. Kenny, “The effect of the temperature-dependent nonlinearities on the temperature stability of micromechanical resonators,” Journal of Applied Physics, vol. 114, no. 15, p. 153513, 2013.
  • E. E. Moon, S. A. Chandorkar, S. V. Sreenivasan, and R. F. Pease, “Thermally controlled alignment for wafer-scale lithography,” Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 12, no. 3, pp. 031 109–031 109, 2013.
  • S. S. Mande, S. A. Chandorkar, and A. Chandorkar, “Process variation aware dual-vth assignment technique for low power nanoscale cmos design,” Microelectronics Reliability, vol. 51, no. 12, pp. 2357–2365, 2011.
  • HK Lee, R Melamud, S Chandorkar, J Salvia, S Yoneoka, TW Kenny, “Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime”, Microelectromechanical Systems, Journal of, pp 1228-1230, 2011.
  • A.Hosseini, D. Kwong, Y. Zhang, S. A. Chandorkar, F. Crnogorac, A. Carlson, B. Fallah, S. Bank, E. Tutuc, J. Rogers, R. F. W. Pease, and R. T. Chen, “On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems”, Journal of Vacuum Science and Technology B 28, C601, Nov. 2010.
  • S. Yoneoka, J.C. Salvia, G. Bahl, R. Melamud, S. A. Chandorkar, and T.W. Kenny, "Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations," Journal of Microelectromechanical Systems, vol.19, no.5, pp.1270-1272, Oct. 2010.
  • S. A. Chandorkar, R. N. Candler, A. Duwel, R. Melamud, M. Agarwal, K. E. Goodson, and T. W. Kenny, “MultiMode Thermoelastic Dissipation,” Journal of Applied Physics, vol. 105, pp. 043505-13, 2009.
  • G. Bahl, R. Melamud, B. Kim, S. A. Chandorkar, J. C. Salvia, M. A. Hopcroft, D. Elata, R. G. Hennessy,  R. N. Candler, R. T. Howe and T. W. Kenny, “Model and Observations of Dielectric Charge in Thermally Oxidized Silicon Resonators,” Journal of Microelectromechanical Systems, vol. 19, pp 162-174, 2009.
  • J. Salvia, R. Melamud, S. Chandorkar, S. F. Lord, T. W. Kenny, “Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase Lock Loop,” Journal of Microelectromechanical Systems, 2009.
  • S. Yoneoka, C. S. Roper, R. N. Candler, S. A. Chandorkar, A. B. Graham, J Provine, R. Maboudian, R. T. Howe, and T. W. Kenny, "Characterization of encapsulated micromechanical resonators sealed and coated with polycrystalline SiC," Journal of Microelectromechanical Systems, 2009.
  • B. Kim, R. N. Candler, C. M. Jha, R. Melamud, S. Yoneoka, H. K. Lee, M. A. Hopcroft, S. A. Chandorkar, G. Yama, and T. W. Kenny, "Hermeticity and Diffusion Investigation in Polycystalline Silicon Encapsulation for MEMS Devices," Journal of Applied Physics, vol. 105, pp. 013514, Jan 2009.
  • R. Melamud, S. A. Chandorkar, B. Kim, H. K. Lee, J. C. Salvia, G. Bahl, M. A. Hopcroft and T. W. Kenny, “Temperature-Insensitive Composite Micromechanical Resonators,” IEEE JMEMS vol. 18, pp 1409-1419, 2009.
  • C. Jha, J. Salvia, S. Chandorkar, R. Melamud, E. Kuhl, and T. Kenny, “Acceleration insensitive encapsulated silicon microresonator,” Applied Physics Letters, vol. 93, no. 23, p. 234103, 2008.
  • B. Kim, M. A. Hopcroft, R. N. Candler, C. M. Jha,  M. Agarwal, R. Melamud, Chandorkar, S.A., G. Yama, T.W. Kenny, “Temperature dependence of quality factor in MEMS resonators,” IEEE Journal of Microelectromechanical Systems, vol. 17, no. 3, pp. 755-766 June 2008.
  • C. M. Jha, M. A. Hopcroft, S. A. Chandorkar, J. Salvia, M. Agarwal, R. N. Candler, R. Melamud, B. Kim, and T. W. Kenny, “Thermal Isolation of Encapsulated MEMS Resonators,” Journal of Microelectromechanical Systems, In Press, 2007.
  • R. Melamud, B. Kim, S. A. Chandorkar, M. A. Hopcroft, M. Agarwal, C. M. Jha and T. W. Kenny, "Temperature-Compensated High-Stability Silicon Resonators," Applied Physics Letters, 90, 1, 2007.
  • C. M. Jha, G. Bahl, R. Melamud, S. A. Chandorkar, M. A. Hopcroft, B. Kim, M. Agarwal, J. Salvia, H. Mehta, and T. W. Kenny, "High Resolution Microresonator-based Digital Temperature Sensor," Applied Physics Letters, 91 - 3, August 2007.
  • M. Agarwal, S. A. Chandorkar, H. Mehta, R. N. Candler, B. Kim, M. A. Hopcroft, R. Melamud, C. M. Jha, G. Bahl, G. Yama et al., “A study of electrostatic force nonlinearities in resonant microstructures,” Applied Physics Letters, vol. 92, no. 10, pp. 104 106–104 106, 2008.
  • M. Agarwal, H. Mehta, R. N . Candler, S. Chandorkar, B. Kim, M. A. Hopcroft, R. Melamud, G. Bahl, G. Yama, T. W. Kenny and B. Murmann, “Scaling of A-f Nonlinearities in Electrostatically Coupled MEMS Resonators,” Journal of Applied Physics, 2007.
  • M.A. Hopcroft, B. Kim, S. Chandorkar, R. Melamud, M. Agarwal, C.M. Jha, G. Bahl, J. Salvia, H. Mehta, H. K. Lee, R.N. Candler, T.W. Kenny, “Using the Temperature Dependence of Resonator Quality Factor as a Thermometer,” Applied Physics Letters, vol. 91, 013505, 2007.
  • M. Agarwal, K. K. Park, S. A. Chandorkar, R. N. Candler, B. Kim, M. A. Hopcroft, R. Melamud, T. W. Kenny, and B. Murmann, “Acceleration Sensitivity in Beam-type Electrostatic Microresonators,” Applied Physics Letters, vol. 90, no. 1, 014103, 2007.
  • M. Agarwal, S. A. Chandorkar, R. N. Candler, B. Kim, M. A. Hopcroft, R. Melamud, C. M. Jha, D. B. Leeson, T. W. Kenny, B. Murmann, “Optimal Drive Condition for Nonlinearity Reduction in Electrostatic MEMS resonators,” Applied Physics Letters, vol. 89, no. 21, pp. 4105-07, 2006.
  • R. N. Candler, A. Duwel, M. Varghese, S. A. Chandorkar, M. Hopcroft, W. T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, “Impact of Geometry on Thermoelastic Dissipation in Micromechanical Resonant Beams,” Journal of Microelectromechanical Systems, Vol. 15, pp 927-934, 2006.
  • P. R. Apte, S. A. Chandorkar, and P. S. Gandhi, “2d simulation of multilayered mems structures,” in Smart Materials, Structures, and Systems. International Society for Optics and Photonics, 2003, pp. 761–772.
  • R. P. Dhote, S. S. Chiluveru, S. A. Chandorkar, and P. R. Apte, “A novel heatuator,” International Journal of Computational Engineering Science, vol. 4, no. 03, pp. 627–630, 2003.Science, vol. 4, no. 03, pp. 627–630, 2003.

Refereed Conference Papers:

  • J. Rodriguez et al., "Direct measurements of anchor damping in MEMS resonators," 2017 IEEE SENSORS, Glasgow, United Kingdom, 2017, pp. 1-3.
  • Dustin D. Gerrard, Saurabh A. Chandorkar, Janna Rodriguez, Ian B. Flader, Lizmarie Comenencia Ortiz, Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, “Topology Optimization for Reduction of Thermoelastic Dissipation in MEMS Resonators”, 2017 Transducers, Kaohsiung, 2017, pp. 794-797.
  • J Rodriguez, DD Gerrard, S Chandorkar, Y Chen, GM Glaze, IB Flader, CH Ahn, EJ Ng, TW Kenny, "Wide-range temperature dependence studies for devices limited by thermoelastic dissipation and anchor damping," 2017 Transducers, Kaohsiung, 2017, pp. 1100-1103.
  • Dustin D. Gerrard, Janna Rodriguez, Saurabh A. Chandorkar, Ian B. Flader, Lizmarie Comenencia Ortiz, Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, “Manipulation of heat flux paths in thermos-elastically damped resonators for Q Optimization,” IEEE MEMS, 2017.
  • Dustin D. Gerrard, Janna Rodriguez, Saurabh A. Chandorkar, Ian B. Flader, Lizmarie Comenencia Ortiz, Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, “Manipulation of heat flux paths in thermos-elastically damped resonators for Q Optimization,” Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on. IEEE, 2017.
  • H. Lee, R. Melamud, S. Chandorkar, Y. Qu, J. Salvia, B. Kim, M. Hopcroft, and T. Kenny, “Influence of the af effect on the temperature stability of silicon micromechanical resonators,” in Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS),16th International. IEEE, 2011, pp. 506–509.
  • S. Wang, S. Chandorkar, A. Graham, M. Messana, J. Salvia, and T. Kenny, “Encapsulated mechanically coupled fully-differential breathemode ring filters with ultra-narrow bandwidth,” in Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. IEEE, 2011, pp. 942–945.
  • H. Lee, P. Ward, A. Duwel, J. Salvia, Y. Qu, R. Melamud, S. Chandorkar, M. Hopcroft, B. Kim, and T. Kenny, “Verification of the phase-noise model for mems oscillators operating in the nonlinear regime,” in Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. IEEE, 2011, pp. 510–513.
  • H. K. Lee, R. Melamud, S. Chandorkar, Y. Q. Qu, J. Salvia, and T. W. Kenny, “Motional impedance of resonators in the nonlinear regime,” in Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International. IEEE, 2011, pp. 1–6.
  • H. Lee, J. Salvia, S. Yoneoka, G. Bahl, Y. Qu, R. Melamud, S. Chandorkar, M. Hopcroft, B. Kim, and T. Kenny, “Stable oscillation of mems resonators beyond the critical bifurcation point,” Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Workshop, pp. 70–73, 2010.
  • B. Kim, R. Melamud, R. Candler, M. Hopcroft, C. Jha, S. Chandorkar, and T. Kenny, “Encapsulated mems resonators a technology path for mems into frequency control applications,” Proc. IEEE IFCS, pp. 1–4, 2010.
  • H. K. Lee, J. Salvia, G. Bahl, R. Melamud, S. Yoneoka, Y. Q. Qu, S. Chandorkar, M. A. Hopcroft, B. Kim, and T. W. Kenny, “Influence of the temperature dependent af effect on the design and performance of oscillators,” in Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on. IEEE, 2010, pp. 699–702.
  • Qu, Yu Qiao, R. Melamud, S. Chandorkar, Hyung Kyu Lee and T.W. Kenny, "Stress relaxation study of sputtered Platinum thin films at near room temperature using an ultrasensitive strain gauge,"  IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010, pp.548-551, 24-28 Jan. 2010.
  • G. Bahl, J. Salvia, I. Bargatin, S. Yoneoka, R. Melamud, B. Kim, S. Chandorkar, M. A. Hopcroft, R. Bahl, R. T. Howe, and R. Maboudian, "Charge-drift elimination in resonant electrostatic MEMS," Proc. 23rd IEEE MEMS 2010, Hong Kong, 2010, pp. 108-111.
  • H. K. Lee, S. Yoneoka, G. Bahl, J. Salvia, Y. Q. Qu, R. Melamud, S. Chandorkar, B. Kim, M. A. Hopcroft, and T. W. Kenny, "A novel characterization method for temperature compensation of composite resonators," Proc. 23rd IEEE MEMS 2010, Hong Kong, 2010, pp. 743-746.
  • S. Wang, S. Chandorkar, J. Salvia, R. Melamud, V. Qu, H. Lee and T.W. Kenny, “Nonlinearity of hermetically encapsulated high-Q double balanced breathe-mode ring resonator,” Proc. IEEE MEMS 2010.
  • H. K. Lee, J. Salvia, G. Bahl, R. Melamud, S. Yoneoka, Y. Q. Qu, S. Chandorkar, M. A. Hopcroft, B. Kim, and T. W. Kenny, "Influence of the temperature dependent A-f effect on the design and performance of MEMS oscillators," Proc. 23rd IEEE MEMS 2010, Hong Kong, 2010, pp. 699-702.
  • J. Salvia, R. Melamud, S. Chandorkar, H.K. Lee, Y.Q. Qu, S.F. Lord, B. Murmann and T.W. Kenny., “Phase Lock Loop Based Temperature Compensation for MEMS Oscillators,” Proc. 22nd IEEE MEMS 2009, Sorrento, Italy, pp. 661-664, Jan. 25-29, 2009.
  • S. A. Chandorkar and R. F. Pease, “Theoretical Analysis of Thermal Actuator based Nanoimprint Lithography,” Nanoprinting Nanoimprinting Technology (NNT),  2009.
  • Marc Weinberg, Rob Candler, S. A. Chandorkar, Jon Varsanik, Tom Kenny, and Amy Duwel, “Energy Loss in MEMS Resonators and the Impact on Intertial and RF Devices,” Invited Review Paper in Transducers 2009, pp. 688-695.
  • J. Salvia, M. Messana, M. Ohline, M.A. Hopcroft, R. Melamud, S. Chandorkar, H.K. Lee, G. Bahl, B. Murmann, and T.W. Kenny, “Exploring the limits and practicality of Q-based temperature compensation for silicon resonators” IEDM 2008 Tech. Digest, San Francisco, CA, USA, pp. 671-674, Dec. 15-17, 2008.
  • S. A. Chandorkar, M. Agarwal, R. Melamud, R. N. Candler, K. E. Goodson, and T. W. Kenny, “Limits of Quality Factor in Bulk-Mode Micromechanical Resonators,” 2008 IEEE 21st International Conference on MEMS, Tucson, AZ, 2008, pp. 74-77.
  • G. Bahl, R. N. Candler, R. Hennessy, D. Elata, R. Melamud, S. Chandorkar, B. Kim, M. Hopcroft, J. Salvia, C. M. Jha, S. Yoneoka, G. Yama, R. T. Howe, and T. W. Kenny, "Observation of Fixed and Mobile Charge in Composite MEMS Resonators," Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head ‘08, Hilton Head, SC, USA, pp 102-105, June 1-5, 2008.
  • B. Kim, M. Hopcroft, C. M. Jha, R. Melamud, S. Chandorkar, M. Agarwal, K. L. Chen, W. T. Park, R. Candler, G. Yama, A. Partridge, M. Lutz, T. W. Kenny, “Using MEMS to Build the Device and the Package,” Transducers/Eurosensors 2007.
  • B. Kim, R. Melamud, M. A. Hopcroft, S. Chandorkar, M. Agarwal, G. Bahl, M. Messana, R. N. Candler, G. Yama, and T. W. Kenny, “Si-SiO2 Composite MEMS Resonator in CMOS Compatible Encapsulation,” presented at IEEE Frequency Control Symposium, 2007.
  • M. Agarwal, H. Mehta, R. N. Candler, G. Yama, S. A. Chandorkar, B. Kim, M. A. Hopcroft, R. Melamud, G. Bahl, T. W. Kenny, and B. Murmann, “Impact of Miniaturization on the Current Handling of Electrostatic MEMS Resonators,” presented at MEMS 2007.
  • S. A. Chandorkar, H. Mehta, M. Agarwal, M. A. Hopcroft, C. M. Jha, G. Yama, R. N. Candler, G. Bahl, B. Kim, R. Melamud, K. E. Goodson, and T. W. Kenny, ”Non-isothermal Micromechanical Resonators,” presented at MEMS 2007.
  • T. W. Kenny, A. Partridge, R. N. Candler, W.-T. Park, M. Hopcroft, B. Kim, M. Agarwal, S. A. Chandorkar, R. Melamud, and C. Jha, "Manufacturable MEMS: Building the MEMS, the Package and the Circuit in the Same Technology," presented at International Forum on Micro-Nano Hetero System Integration in Sendai (MHSI'06), 2006.
  • T. W. Kenny, M. Lutz, A. Partridge, G. Yama, R. N. Candler, W.-T. Park, M. Hopcroft, B. Kim, M. Agarwal, S. A. Chandorkar, R. Melamud, and C. Jha, "Advances in MEMS Integration: MEMS First or MEMS Last?" presented at 12th International Micromachine/Nanotech Symposium, 2006.
  • M. Agarwal, K.K. Park, B. Kim, M.A. Hopcroft, S.A. Chandorkar, R.N. Candler, C.M. Jha, R. Melamud, T.W. Kenny, and B. Murmann, “Amplitude Noise Induced Phase Noise In Electrostatic MEMS Resonators”, Solid State Sensors, Actuators, and Microsystems Workshop (Hilton Head), pp. 90-93, 2006.
  • M. Agarwal, K.K. Park, R. N. Candler, B. Kim, M. Hopcroft, S. A. Chandorkar, C. M. Jha, R. Melamud, T. W. Kenny, B. Murmann, “Nonlinear Characterization of Electrostatic MEMS Resonators”, IEEE International Frequency Control Symposium, pp. 209-212, 2006.
  • B. Kim, C. Jha, T. White, R. N. Candler, M. Hopcroft, M. Agarwal, K. Park, S. A. Chandorkar, and T. W. Kenny, "Temperature Dependence of Quality Factor in MEMS Resonators," MEMS 06, pp. 590-593, 2006.
  • R. N. Candler, M. Hopcroft, C. W. Low, S. A. Chandorkar, B. Kim, M. Varghese, A. Duwel, and T. W. Kenny, "Impact of Slot Location on Thermoelastic Dissipation in Micromechanical Resonators," Transducers '05, pp. 597-600, 2005.
  • R. Melamud, M. Hopcroft, C. Jha, B. Kim, S. A. Chandorkar, R. N. Candler, and T. W. Kenny, "Effects of Stress on the Temperature Coefficient of Frequency in Double Clamped Resonators,” Transducers 2005, pp. 392-395, 2005.
  • S. A. Chandorkar, R.N. Candler, A. Duwel, M. Varghese, T. Kenny and K. Goodson, “Entropic Modeling of Thermoelastic Dissipation in Microstrcutures”, Oral Presentation in MRS spring conference, March 2005.
  • R. N. Candler, M. Hopcroft, W.-T. Park, S. A. Chandorkar, G. Yama, K. E. Goodson, M. Varghese, A. Duwel, A. Partridge, M. Lutz, and T. W. Kenny, "Reduction in Thermoelastic Dissipation in Micromechanical Resonators by Disruption of Heat Transport," Solid State Sensors, Actuators, and Microsystems Workshop (Hilton Head), pp. 45-48, 2004.
  • R. P. Dhote, S. S. Chiluveru, S. A. Chandorkar and P. R. Apte, “A Novel Heatuator,” International Conference on Materials for Advanced Technologies, December 2003 (Won best paper award).
  • S. A. Chandorkar and P. R. Apte, “Effect of Torsion Arm Dimensions on Natural Frequency of a Torsion Mirror”, Proceedings of International Workshop on Physics of Semiconductor Devices (IWPSD), New Delhi, India, Vol. 1, pp. 530-533, December 2001.

Patents

  • R. Melamud, B. Kim, M. Hopcroft, S. A. Chandorkar, M. Agarwal and T. W. Kenny, “Composite mechanical transducers and approaches therefor”, US 2007/0277620 A1, Dec 6, 2007
  • R. Melamud, B. Kim, M. Hopcroft, S. A. Chandorkar, M. Agarwal and T. W. Kenny, “Composite mechanical transducers and approaches therefor”, US 2010/7806586 A1, Oct 5, 2010
  • S. A. Chandorkar, Y. K. Liu, P. Warner, M. Penchev, T. Malahat and K. Chakravorty, “Charge accumulation mitigation by surface energy modification”, Intel Trade Secret, Dec 2014