B.Tech. Mechanical Engineering (2010), NIT Warangal.
Design Engineer, Applied Materials India Pvt. Ltd.,.India, (2010-2012).
IEEE Journal of Microelectromechanical Systems, 28 (6), P 1039-1054, 2019.
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| Fig. 1. Fixed-fixed beams fabricated from amorphous silicon carbide films deposited by PECVD. The beam is buckled due to presence of compressively residual stress in the thin film. | Fig. 2. An array of such buckled beams of varying dimensions. |
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| Fig. 3. Non-dimensional frequency (first four modes) vs. Non-dimensional axial load parameter plot for compressive residual stress carrying buckled PECVD-SiCx beams. Solid-lines and points show the analytical prediction and measured natural frequencies respectively and the dashed lines show the sensitivity of frequency to residual stress. | |