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Stiction Free Fabrication of MEMS Devices with Shallow Cavities Using a Two-Wafer Anodic Bonding Process

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TitleStiction Free Fabrication of MEMS Devices with Shallow Cavities Using a Two-Wafer Anodic Bonding Process
Publication TypeJournal Article
Year of Publication2012
AuthorsK. Reddy, J, Bhat, KN, Pratap, R
JournalJournal of ISSS
Volume1
Pagination1-9
Research Area: 
MEMS/NEMS