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Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193nm Optical Lithography

TitleFabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193nm Optical Lithography
Publication TypeJournal Article
Year of Publication2010
AuthorsSelvaraja, SK, Jaenen, P, Bogaerts, W, Dumon, P, Van Thourhout, D, Baets, R
JournalIEEE Journal of Lightwave Technology
Volume27
Pagination4076–4083