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Analytical Evaluation of Squeeze Film Forces in a CMUT with Sealed Air-filled Cavity

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TitleAnalytical Evaluation of Squeeze Film Forces in a CMUT with Sealed Air-filled Cavity
Publication TypeJournal Article
Year of Publication2011
AuthorsAhmad, B, Pratap, R
JournalIEEE Sensors Journal
Volume11
Pagination2426-2431
Research Area: 
MEMS/NEMS