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Analytical Solution of Modified Reynolds Equation for Squeeze Film Damping in Perforated MEMS Structures

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TitleAnalytical Solution of Modified Reynolds Equation for Squeeze Film Damping in Perforated MEMS Structures
Publication TypeJournal Article
Year of Publication2007
AuthorsPandey, AK, Pratap, R, Chau, FSiong
JournalSensors and Actuators A
Volume135
Research Area: 
MEMS/NEMS