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Analytical Solutions for the Stiffness and Damping Co-efficients of Squeeze Films in MEMS Devices Having Perforated Back Plate

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TitleAnalytical Solutions for the Stiffness and Damping Co-efficients of Squeeze Films in MEMS Devices Having Perforated Back Plate
Publication TypeJournal Article
Year of Publication2005
AuthorsMohite, SS, V. Kesari, H, Sonti, R, Pratap, R
JournalJournal of Micromechanics and Microengineering
Volume15
Research Area: 
MEMS/NEMS