| Title | Au-free recessed Ohmic contacts to AlGaN/GaN high electron mobility transistor: Study of etch chemistry and metal scheme |
| Publication Type | Journal Article |
| Year of Publication | 2020 |
| Authors | Guiney, I, Humphreys, CJ, Sen, P, Muralidharan, R, Nath, DN, , |
| Journal | JVSTB |
| Volume | 38 |
| Pagination | 032207 |
| DOI | 10.1116/1.5144509 |
