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On-Chip Chemical Sensing Using Slot-Waveguide-Based Ring Resonator

TitleOn-Chip Chemical Sensing Using Slot-Waveguide-Based Ring Resonator
Publication TypeJournal Article
Year of Publication2020
AuthorsMere, V, Muthuganesan, H, Kar, Y, Van Kruijsdijk, C, Selvaraja, SKumar
JournalIEEE Sensors Journal
KeywordsLiquids, Optical ring resonators, optical waveguides, refractive index, Sensitivity, Sensors, System-on-chip

We demonstrate static and dynamic bulk refractive index measurement using slot-waveguide based ring resonator. A detailed simulation is performed to optimize the slot-waveguide geometry for maximum sensitivity. The on-chip measurements are performed using a slot waveguide ring resonator by applying aqueous solutions of acids and bases at different concentrations. Based on these measurements, we derive a relation of refractive index change per unit change in concentration of the liquids in water. We experimentally measured a maximum sensitivity of 476 nm/RIU, enabling a limit of detection (LOD) of 1.05×10-5 RIU. Finally, we demonstrate dynamic refractive index on-chip measurement by diluting potassium bicarbonate with hydrogen peroxide.