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On-chip silicon-photonics based integrated vibrometer

TitleOn-chip silicon-photonics based integrated vibrometer
Publication TypeConference Paper
Year of Publication2019
AuthorsMere, V, Dash, A, Kallega, R, Naik, A, Pratap, R, Selvaraja, SKumar
Conference NameMOEMS and Miniaturized Systems XVIII
PublisherInternational Society for Optics and Photonics
KeywordsDiffraction gratings, Integrated optics, Optical sensors, Sensors, Silicon photonics, Waveguides

In this paper, we demonstrate a compact Silicon photonics-based on-chip integrated interference vibrometer. Unlike conventional readout methods, the demonstrated system is alignment-free and offers multiplex sensing. The intensity that is modulated by the cantilever motion by a photodetector. We present the static and dynamic response of the cantilever by electrostatic excitation validated using ac commercial Laser-Doppler-Vibrometer. We also present a detailed simulation, optimisation and sensitivity analysis of the proposed on-chip vibrometer. Furthermore, the tunability of the sensor to achieve maximum sensitivity is demonstrated.