Title | On-chip silicon-photonics based integrated vibrometer |
Publication Type | Conference Paper |
Year of Publication | 2019 |
Authors | Mere, V, Dash, A, Kallega, R, Naik, A, Pratap, R, Selvaraja, SKumar |
Conference Name | MOEMS and Miniaturized Systems XVIII |
Publisher | International Society for Optics and Photonics |
Keywords | Diffraction gratings, Integrated optics, Optical sensors, Sensors, Silicon photonics, Waveguides |
Abstract | In this paper, we demonstrate a compact Silicon photonics-based on-chip integrated interference vibrometer. Unlike conventional readout methods, the demonstrated system is alignment-free and offers multiplex sensing. The intensity that is modulated by the cantilever motion by a photodetector. We present the static and dynamic response of the cantilever by electrostatic excitation validated using ac commercial Laser-Doppler-Vibrometer. We also present a detailed simulation, optimisation and sensitivity analysis of the proposed on-chip vibrometer. Furthermore, the tunability of the sensor to achieve maximum sensitivity is demonstrated. |
URL | https://doi.org/10.1117/12.2509203 |