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A Compact Squeeze-film Model including Inertia, Compressibility and Rarefaction Effects for Perforated 3D MEMS Structures

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TitleA Compact Squeeze-film Model including Inertia, Compressibility and Rarefaction Effects for Perforated 3D MEMS Structures
Publication TypeJournal Article
Year of Publication2008
AuthorsMohite, SS, Sonti, VR, Pratap, R
JournalJournal of Microelectromechanical Systems
Volume17
Pagination709–723
Date Publishedjun
Research Area: 
MEMS/NEMS