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A Comparative Study of Analytical Squeeze-Film Damping Models in Perforated MEMS Structures with Experimental Results

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TitleA Comparative Study of Analytical Squeeze-Film Damping Models in Perforated MEMS Structures with Experimental Results
Publication TypeJournal Article
Year of Publication2008
AuthorsPandey, AK, Pratap, R
JournalMicrofluidics and Nanofluidics
Volume4
Research Area: 
MEMS/NEMS