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A Comparative Study of the Equivalent Circuits for MEMS Capacitive Microphones and a Critical Evaluation of the Equivalent Parameters

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TitleA Comparative Study of the Equivalent Circuits for MEMS Capacitive Microphones and a Critical Evaluation of the Equivalent Parameters
Publication TypeJournal Article
Year of Publication2005
AuthorsMohite, SS, Sonti, VR, Pratap, R
JournalAdvances in Vibration Engineering
Volume4
Research Area: 
MEMS/NEMS