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Design of LTCC Micromachined Vibratory Rate Gyroscope Through Finite Element Analysis

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TitleDesign of LTCC Micromachined Vibratory Rate Gyroscope Through Finite Element Analysis
Publication TypeJournal Article
Year of Publication2006
AuthorsJalan, SK, Pratap, R
JournalAdvances in Vibration Engineering
Volume5
Research Area: 
MEMS/NEMS