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Development of Frequency Tunable Fluid Loaded PMUTs

TitleDevelopment of Frequency Tunable Fluid Loaded PMUTs
Publication TypeConference Paper
Year of Publication2021
AuthorsRoy, K, Kalyan, K, Ashok, A, Shastri, V, Pratap, R
Conference Name2021 IEEE International Ultrasonics Symposium (IUS)
KeywordsControl systems, Fluids, Real-time systems, Resonant frequency, switches, Transducers, Ultrasonic imaging

We report on the development of a novel technique for creating real-time frequency tuning in Piezoelectric Micromachined Ultrasound Transducers (PMUTs). This technique employs controlled virtual added mass in a confined microfluidic environment as a switch to tune the resonant frequency of a PMUT. Using this technique, we could vary the frequency of a 500circular PMUT from 489 kHz to 210 kHz, corresponding to a tuning range of 57%. This shows the potential of using such a technique in creating PMUTs with a wide range of frequency tuning.