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Dummy device-based feedthrough cancellation for PZT on Silicon microcantilever for viscosity sensing

TitleDummy device-based feedthrough cancellation for PZT on Silicon microcantilever for viscosity sensing
Publication TypeConference Paper
Year of Publication2024
AuthorsJaved, N, Kumar, A, Tiwari, S, Pratap, R, Pillai, G
Conference Name2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
PublisherIEEE
KeywordsBiology, Fluid dynamics, Performance evaluation, Q-factor, silicon, Silicon-on-insulator, Viscosity
Abstract

This abstract reports a thin film Lead Zirconate Titanate (PZT) on a Silicon-On-Insulator (SOI) microcantilever device as a fluid dynamic-viscosity (ηfluid) sensor. It uses identical compensation (dummy) device based common drive and differential sensing to eliminate parasitic feedthrough. We experimentally demonstrate feedthrough cancellation and signal-to-background (SBR) ratio increase (>10 dB) in the microcantilever device’s second-flexural mode. Electrical characterization of the microcantilever is performed on different concentrations of glycerol-water solutions over a wide viscosity range of 0.78−6.15cP.
DOI10.1109/EDTM58488.2024.10511369