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The effect of evacuated backside cavity on the dynamic characteristics of a capacitive micromachined ultrasound transducer

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TitleThe effect of evacuated backside cavity on the dynamic characteristics of a capacitive micromachined ultrasound transducer
Publication TypeJournal Article
Year of Publication2010
AuthorsAhmad, B, Pratap, R
JournalInternational Journal of Advances in Engineering Sciences and Applied Mathematics
Volume2
Pagination50-54
Research Area: 
MEMS/NEMS