0
Title | Effect of Flexural Modes on Squeeze Film Damping In MEMS Cantilever Resonators |
Publication Type | Journal Article |
Year of Publication | 2008 |
Authors | Pandey, AKumar, Pratap, R |
Journal | Journal of Micromechanics and Microengineering |
Volume | 17 |
Pagination | 2475–2484 |
Research Area: