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Effect of metal coating and residual stress on the resonant frequency of MEMS resonators

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TitleEffect of metal coating and residual stress on the resonant frequency of MEMS resonators
Publication TypeJournal Article
Year of Publication2009
AuthorsPandey, AK, Venkatesh, KP, Pratap, R
JournalSadhana: Academy Proceedings in Engineering Sciences
Volume34
Date Publishedaug
Research Area: 
MEMS/NEMS