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Effect of Pressure on Fluid Damping In MEMS Torsional Resonators with Flow Ranging from Continuum to Molecular Regime

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TitleEffect of Pressure on Fluid Damping In MEMS Torsional Resonators with Flow Ranging from Continuum to Molecular Regime
Publication TypeJournal Article
Year of Publication2008
AuthorsPandey, AK, Pratap, R, Chau, FSiong
JournalExperimental Mechanics
Volume48
Date Publishedfeb
Research Area: 
MEMS/NEMS