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Effect of Process Induced Variations on Performance Characteristics of a Dual Mass Vibratory MEMS Gyroscope

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TitleEffect of Process Induced Variations on Performance Characteristics of a Dual Mass Vibratory MEMS Gyroscope
Publication TypeJournal Article
Year of Publication2009
AuthorsLohar, KA, P, VK, Pratap, R
JournalInternational Journal of Micro and Nano Systems
Volume1
Date Publishedjun
Research Area: 
MEMS/NEMS