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Elasto-Electrostatic Analysis of Circular Microplates Used in Capacitive Micromachined Ultrasonic Transducers

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TitleElasto-Electrostatic Analysis of Circular Microplates Used in Capacitive Micromachined Ultrasonic Transducers
Publication TypeJournal Article
Year of Publication2010
AuthorsAhmad, B, Pratap, R
JournalIEEE Sensors Journal
Volume10
Pagination1767–1773
Research Area: 
MEMS/NEMS