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Electrical Properties of Atomic Layer Deposited Aluminum Oxide on Gallium Nitride

TitleElectrical Properties of Atomic Layer Deposited Aluminum Oxide on Gallium Nitride
Publication TypeJournal Article
Year of Publication2011
AuthorsEsposto, M, Krishnamoorthy, S, Nath, DN, Bajaj, S, Hung, T-H, Rajan, S
JournalApplied Physics Letters
Volume99
Pagination133503