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On the Equivalence of Acoustic Impedance and Squeeze Film Impedance in Micromechanical Resonators

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TitleOn the Equivalence of Acoustic Impedance and Squeeze Film Impedance in Micromechanical Resonators
Publication TypeJournal Article
Year of Publication2015
AuthorsMalhi, CKaur, Pratap, R
JournalJournal of Vibration and Acoustics, ASME
Research Area: 
MEMS/NEMS