Title | Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193nm Optical Lithography |
Publication Type | Journal Article |
Year of Publication | 2010 |
Authors | Selvaraja, SK, Jaenen, P, Bogaerts, W, Dumon, P, Van Thourhout, D, Baets, R |
Journal | IEEE Journal of Lightwave Technology |
Volume | 27 |
Pagination | 4076–4083 |