Title | Gate recess structure engineering using silicon-nitride-assisted process for increased breakdown voltage in pseudomorphic HEMTs |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | K Bhat, M, Mandal, S, Pathak, S, G Saravanan, S, Sridhar, C, Badnikar, SL, Vyas, HP, Muralidharan, R, Jain, MK, Subrahmanyam, A |
Journal | Semicond. Sci. Technol |
Volume | 27 |