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Hybrid elements for modeling squeeze film effects coupled with structural interactions in vibratory MEMS devices

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TitleHybrid elements for modeling squeeze film effects coupled with structural interactions in vibratory MEMS devices
Publication TypeJournal Article
Year of Publication2014
AuthorsRoychowdhury, A, Nandy, A, Jog, CS, Pratap, R
JournalCMES: Computer Modeling in Engineering and Sciences
Volume103
Pagination91-110
Research Area: 
MEMS/NEMS